Microelectronics
Simulating Challenging Operational Environments
By Timothy J. Copeland
Simulating noise and vibration environments is key for successful product operation.
Active Vibration Isolation For Highly Sensitive Measurement Equipment
By Dr. Uwe Stöbener
To counteract building vibration, active isolation systems can achieve a very low remaining vibration level, especially for low frequency disturbances without the resonance behavior of a passive isolation system.
Solving Semiconductor Equipment Leveling Problems and Establishing Process Uniformity Standards
By Craig C. Ramsey, Ph.D.
It is inherently difficult to measure the inclination of semiconductor process equipment as access to the equipment may be limited and traditional leveling methods, including eyeballing and bubble levels, do not have the precision or repeatability required to establish leveling standards.
Vibration Isolation in Cleanrooms: A System for Virtually Every Application
By Hamid Shaidani
Because such high-precision equipment must also match the appropriate class of cleanroom specifications, today’s market offers a sometimes confusing array of vibration isolation products, many of which did not exist 20 years ago. With so many choices, it is important to match the equipment to the application.
Why Is Random Vibration Quantified In Strange g2/Hz Units?
By Wayne Tustin
Random vibration spectra (as in test specifications) usually show intensity as power spectral density (PSD), auto-spectral density, or acceleration spectral density (ASD) in rather strange units of g2/Hz vs. frequency in Hz.
Vibration Isolation in the Cleanroom Environment
By Robert P. Haley
Vibration isolation is critical for many applications including bioimaging, optical alignment, and microelectronics manufacturing and inspection Many of these applications and their processes occur in environments where contamination must be controlled and cleanliness levels must be maintained.