Equipment
Estimating Drying Times, Break-through Times, Permeation Rates, and Post-Purge Outgassing For Microenvironments
By Sung In Moon, L. Monson, Y. Liu, M. Fuller, C. W. Extrand
In the future, microenvironments will be required to maintain low oxygen and relative humidity levels to facilitate newer technology nodes.
Purge Micro-Environment With Ionized Air to Reduce Chances of ESD Damages to Wafers
By Mike Cisewski, Huaping Wang
The problem of electrostatic discharge (ESD) resulting from charges on wafers is a serious concern in IC manufacturing processes.
Contamination Control and CGMP
By Barbara Kanegsberg, Ed Kanegsberg
Controlling the fabrication environment is not an end in itself. Manufacturers who process and assemble their product in controlled environments know that the clean-room or mini-environment must be appropriately designed and must also be maintained clean and contamination free.
Cleaning of Isolators and Bio-Safety Cabinets
By Karen Bonnell, Howard Siegerman, Ph.D.
Good contamination control practices and adherence to established, written SOPs can minimize cross-contamination in isolators and bio-safety cabinets.
Controlled Mini-Environments
By Barbara Kanegsberg, Ed Kanegsberg
not every critical component need be processed in a large, tightly specified cleanroom by gowned personnel. Sometimes mini-environments provide a superior and cost-effective option.
New Closed-Loop Controls For Minienvironments
By Howard Abramowitz
Often, to ease cost constraints, there is a growing placement of higher purity cleanroom minienvironments inside a larger ballroom space.
Task-Specific Vented Enclosures for Personal and Product Protection
By Ray Ryan, Alexy Kolesnikov, Douglas B. Walters
Task-specific ventilated enclosures are now available for the containment of hazardous laboratory operations and materials.
Gloveboxes Keep Pace With the Market
By Paul Nesdore
Technical journalists like to jump on hot, new, sexy topics like nanotechnology, MEMS, and molecular computing. But there are other essential technologies that are not quite as glamorous and do not receive the press they deserve.